Lithography equipment parts cleaning


  • Fast turnaround
  • Automated cleaning machines that ensure repeatable cleaning results at competitive prices
  • Reduced waste and fluid consumption (solvent, surfactant, water)
  • No investment in machines at customer site
  • Clean and safe carriers and trays thanks to integrated controls and repairs
  • Integrated logistics and storage reducing inventory at customer sites


  • Conductivity of DI water
  • Mechanical particles monitored by LPC
  • Vacuum Outgassing 24 h
  • Residual Gas Analysis (RGA) by analytical means (ICP-MS)