News & Press

Consolidation of Cleanpart Dresden GmbH and CS Service GmbH

26. November 2020

Cleanpart Group GmbH announces the completion of the consolidation of two
of its subsidiaries, Cleanpart Dresden GmbH and CS Service GmbH.

Ownership changes at Cleanpart Group

18. October 2018

Following the antitrust approval, Mitsubishi Chemical Corporation is the new owner of the Cleanpart Group. This holds true for all Cleanpart locations in Germany, France and the USA.

Cleanpart certified by ASML

16. March 2016

Cleanpart was successfully certified by ASML, worldwide leader in the manufacturing of photolithography equipment’s for the semiconductor industry. ASML manufactures machines that are key to the production of integrated circuits (ICs), such as CPUs, MEMS, DRAM memory, flash memory.

ECD - Enhanced CVD Decontamination

3. November 2015

The latest CVD processes used in the semiconductor manufacturing industry have become extremely sensitive to contamination and parts geometry within the process chambers.