Our history goes back to more than 50 years ago when Cleanpart Group started to offer cleaning services to semiconductor customers in Germany.

In 2018, Mitsubishi Chemical Corporation acquired Cleanpart Group and strengthened its capabilities and capacity in precision cleaning.

We are one of the leaders in its markets, and offers services and products in two main areas :

-          Cleaning and coatings for the semiconductor and other industries using ultra-high vaccum equipments

-          Diamond-like-carbon coatings since 2007 through its IKOS-Dynamant division

Cleanpart History 2007 2020