Lithography equipment parts cleaning
BENEFITS
- Fast turnaround
- Automated cleaning machines that ensure repeatable cleaning results at competitive prices
- Reduced waste and fluid consumption (solvent, surfactant, water)
- No investment in machines at customer site
- Clean and safe carriers and trays thanks to integrated controls and repairs
- Integrated logistics and storage reducing inventory at customer sites
PROPERTIES
- Conductivity of DI water
- Mechanical particles monitored by LPC
- Vacuum Outgassing 24 h
- Residual Gas Analysis (RGA) by analytical means (ICP-MS)